并联微操作机器人技术及应用进展

Survey on Parallel Manipulators with Micro/Nano Manipulation Technology and Applications

微/纳米并联微操作机器人技术是综合微/纳米技术和并联机器人技术迅速发展而形成的新研究方向,涉及精密机械、机器人、计算机、自动控制、精密测量等多学科领域,广泛应用于生物医学领域中的细胞与基因操作、精细外科手术、微电子装配、微细加工、光纤对接等领域。通过对当前国内外并联微操作机器人的研究状况、产品化应用以及实际应用等方面的发展态势进行详细地回顾,总结微/纳米级并联微操作机器人这一研究方向在工作空间、运动解耦性、承载能力、理论分析、柔性铰链设计、实时标定与测量、新材料、驱动等方面存在的问题,并提出改进意见,以期对该领域未来的创新设计以及发展研究产生一定的推动作用。

Micro/nano manipulation is a new research direction of parallel manipulator along with the development of nanotechnology, which covers precision machinery, robotics, computer technology, automatic control, and precise measurement, etc., and has been widely used in cells or gene manipulation in biomedical field, precise surgery, microelectronic assembly, micromachining, fiber alignment, etc. The most recent work on micromanipulator research, related industrial products and applications are surveyed, then some problems existing in workspace, movement decoupling, bearing capacity, theoretical analysis, flexure hinge design, real-time calibration and measurement, new materials and actuators, etc., are pointed out and some improvements are proposed. The research will be helpful to future creative design and research development.