摘要
针对微小结构几何量测量的需求,通过集成MEMS微触觉测头和纳米测量机构建了高精度的测量系统。在验证测头性能的基础上,完成了一系列判断测头测量分辨力和精度的实验,在轴向、同向横向、异向横向三个方向测量的标准偏差分别为41.7552nm,6.05μm,6.16μm,同时,在扫描实验中进程回程扫描差值的标准偏差为23.088nm。
According to dimension measurement requirement of micro structure, a measurement system combined by MEMS micro tactile probe and nanomeasuring machine is constructed. On basis of performance verification of probe＇s output, a series of tests are done. The standard deviations of measurement in same vertical , same transverse direction , and opposite transverse direction are 41. 755 2 nm , 6.05 μm , 6.16 μm separately . The standard deviation of difference between trace and retrace in scanning test is 23. 088 nm.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第12期2097-2100,共4页
Chinese Journal of Sensors and Actuators
基金
国家质检总局科技计划资助(D00RJ0704)“纳米测量机在半导体领域的应用”
关键词
微机电系统
微触觉测头
尺寸测量
纳米测量机
MEMS
micro tactile probe
dimension measurement
nanomeasuring machine
