基于灵敏度解析的微机械陀螺结构优化方法

Structural optimization method for micromachined gyroscope using sensitivity analysis

以一种音叉振动式微机械陀螺为研究对象,对其复杂多自由度模型的24个设计参数进行灵敏度解析,分别计算其对系统驱动模态和检测模态固有频率的动态灵敏度,筛选并确定出5个对最终输出性能影响最为关键的尺寸参数;以这5个参数为设计变量,并以系统输出特性作为优化目标对微陀螺结构进行了优化.灵敏度解析方法的应用有效解决了微陀螺结构优化过程中所存在的计算量大、解析时间长等实际问题,对相关MEMS器件的结构优化设计研究具有一定的参考价值.

Focusing on a typical tuning fork vibratory micromachined gyroscope, this paper introduces a sensitivity analysis method to the analysis and optimization of complicated multi-DOF model. It requires a dynamic sensitivity analysis to the 24 design parameters of the gyroscope by examining each parameter＇s influence on the natural frequencies of the driving mode and sensing mode. And then five influential parameters that are most influential on the output performance are determined as the design variables for the following structural optimization. An optimal structure of the gyroscope is obtained by an optimization procedure. The proposed method reduces much of the difficulties in the conventional design method, such as the amount of calculation and analysis period, and can be a reference for the structural design and optimization of MEMS.