摘要
针对热激励谐振型压力传感器在不同激励电压下会产生不同的热梯度场,进而影响传感器的谐振频率这一现象,采用开环测试系统进行试验,得到热激励谐振型压力传感器的热激励幅度与谐振频率的变化规律;并对实验结果进行了进一步的分析,为合理优化设计传感器的相关参数提供了一定的理论依据。
An experiment was made using an open-loop test system to study the influence of excitant voltage on resonant frequency of thermal excited resonant pressure sensors. The relationship of thermal excitant virtual value with resonant frequency of the silicon microstructure resonant pressure sensor was obtained. Results of the experiment were further analyzed to provide a certain theoretic basis for optimal design of thermal excited resonant pressure sensors.
出处
《微电子学》
CAS
CSCD
北大核心
2008年第6期761-764,共4页
Microelectronics
基金
国家863计划基金资助项目(2008AA04Z302)
关键词
谐振型压力传感器
电热激励
热应力
Resonant pressure sensor
Electrothermal excitation
Thermal stress
