基于商用坐标测量机的3D微纳米计量(英文)

3D Micro-and Nano-Metrology Based on Commercial CMM

以测量精度为1μm的商用坐标测量机(CMM)为基础,构建了测量范围为25mm×40mm×25mm、测量不确定度约为0.15μm的PTB微纳米专用坐标测量机.研究了CMM的运动控制系统、恒温室的空调系统以及CMM的被动隔振系统等对测量结果的影响.由测量结果可以看出,CMM的运动控制系统产生的噪声水平约为其他误差源的2倍.通过FFT运算,发现未优化系统的短时最大漂移量发生频率为750Hz,对应为运动控制的工作频率.文中还介绍了测量力为1μN光纤探针的测量原理,并给出了对2.5mm短轴的测量结果.

Based on a commercial coordinate measuring machine（CMM） which is of measurement accuracy of 1 μm, the PTB started a project to develop a special CMM for dimensional metrology on microsystem components with an uncertainty of 0.15 μm in a measurement range of 25 mm × 40 mm ×25 mm. The error sources of motion controller of the CMM, the air conditioning for keeping constant temperature and vibration isolation were studied. Measurement results show that the noise value generated by the motion controller is twice more than that of other error sources. By employing FFT method, the short time drift of the non-optimized machine is also studied, which figures out that the frequency of 750 Hz at which happened the maximum drift comes from motion controller. The working principle of the ＂probe pin＂ which has the measurement force of 1 μN was introduced, and the measurement results on a small shaft with diameter of 2.5 mm were presented.