基于ANSYS悬臂梁式微开关动态特性的分析

Dynamic Characteristics Analysis of Micro-Machined Switch Consisting of Cantilever Beam

利用ANSYS软件采用顺序耦合法对静电驱动悬臂梁式微开关进行力电耦合分析,得出了微开关的动态响应特性,并指出了空气阻尼对器件性能的影响;在动态分析的基础上,详细分析了微开关结构参数和其动态临界电压的关系。分析结果表明:动态临界电压略低于静态临界电压,由于空气阻尼的存在和静电力的非线性,系统的振动频率相对于其固有频率向下发生漂移,这些动态特性与静态特性有明显的不同。

In this paper,a sequence coupling method using ANSYS （analysis system） is introduced in electrostatic and mechanical energy coupled analysis of a cantilever beam in a micro-machined switch,which is actuated by electrostatic force. From the analysis ,the dynamic characteristic of the cantilever beam have been gained ,which point out the influences of air damping. Then the relations between the structural parameters and the dynamic critical voltage of micro-switch are discussed in detail. The results indicate that the dynamic critical voltage is less than the static critical voltage. There is an excursion between the frequency of vibration and the inherence frequency,what with the damping of air and the nonlinearity of electrostatic force. These dynamic characteristics are evidently different from the static characteristics.