摘要
综述了制备蓝色发光二极管的材料及相应的薄膜生长、掺杂和欧姆接触技术的实验研究。介绍并讨论了SiC、GaN和ZnSe蓝色发光二极管的发展状况。
An overview of experimental researches in material film growth,doping and ohmic contact for the blue lightemittingdiodes(LED)is given.Recent progress in the study of SiC,GaN and ZnSe lightemitting diodes is presented.
出处
《半导体技术》
CAS
CSCD
北大核心
1998年第1期1-5,共5页
Semiconductor Technology