束流纹波对全机械扫描离子注入机重复性的影响

The Effect of Ion Beam Current Ripple on the Reproducibility of High Current Ion Implanter With Full Mechanical Scan

分析了束流纹波系数对全机械扫描强流离子注入机重复性的影响，并进行了定量的计算。计算结果表明，要使注入重复性达到小于或等于１％，束流纹波必须稳定在１０％以内。该结果已在ＬＣ－１１型强流离子注入机中得到了验证。

A mathematil model is found to calculate the effect of beam current ripple on reproducibility.The result of calculation indicates that it is necessary to keep beam ripple factor within 10% so as to keep reproducibility≤1%,which is demonstrated in LC11 high current ion implanter.