硅微微压传感器的设计

Research on Micro-machined Low-pressure Sensor

电容式硅微微压传感器具有灵敏度高、稳定性好、加工复杂程度适中等优点,适用于硅微微压传感器的信号转换。采用ANSYS软件对电容式硅微微压力传感器的核心部件进行有限元模拟,即对周边固支的各种结构类型的应变膜进行均布压力作用下的小挠度和大挠度静力学分析。对比各种结构类型的应变膜的挠度特性发现:圆形带岛波纹薄膜因其岛部位移的一致性提高了感测电容的灵敏度,其良好的线性降低了后续检测电路的复杂程度,是电容式硅微微压传感器的较好选择。

Capacitive micro-machined pressure sensor which has a series of advantages, such as high sensitivity, good stability, moderate machining complexity is suitable for signal transition of micro-machined low-pressure transducer. Static performance of several kinds of diaphragms which were the core element of ccapacitive micro-machined pressure were simulated with FEM. The boundary condition was fixed and the load was uniform pressure. The simulation results show that corrugated circle-diaphragm with central boss is suitable for capacitive micro-machined low-pressure sensor because of its high sensitivity and good linearity. The consistency of central boss displacement improves the sensitivity of detecting capacity and the corrugation enhances the linearity of detecting capacitor which decreases the requirements of followed measuring circuit.