Ar气下激光诱导Cu等离子体电子温度的实验研究

An Experimental Investigation on the Electron Temperature of Laser-induced Cu Plasma at Ar Buffer Gas

本文从实验上研究了Ar气下激光诱导Cu等离子体的空间分辨发射光谱。在局部热力学平衡(LTE)条件下,根据谱线的相对强度,得到了等离子体的电子温度在104K以上。研究了原子发射谱线强度、电子温度随空间变化的规律。结果表明,通过Cu(I)和Ar(II)得到的等离子体电子温度随着空间距离的增加都呈下降趋势,具有相同的变化规律。据此,我们可以通过测量背景气体的电子温度来近似判断近靶面未知谱线等离子体的电子温度。

In this paper, the space-resolved emission spectra produced by Nd： YAG laser induced Cu plasma in Ar buffer gas are studied. Under the model of local thermodynamic equilibrium, the electronic temperatures of Cu plasma are deduced to be in the 104 scale by the relative line intensities. The dependence of emission spectra line intensity and eleetronie temperature and FWHM （the full width half maximum） on the space are studied. The results show that the plasma electron temperature which obtain through Cu（Ⅰ） and Ar（Ⅱ） assumes the declining trend along with increasing of the space length, has the same change rule. Accordingly, we may he approximate through the measure background gas electron temperature near target surface judge e unknown spectral line plasma the electron temperature.