X射线衍射分析在硬质合金涂层中的应用

Application of X-ray Diffraction Analyze in the Cemented Carbide Coatings

硬质合金涂层刀具的性能与其内在结构密切相关,特别是涂层部分。利用X射线衍射进行硬质合金涂层性能的综合分析,可测定涂层的物相组成、涂层厚度、晶粒尺寸、残留应力以及涂层中碳的含量等等。观察其衍射图谱,对各种涂层成分如:Al2O3、TiC、TiN、η相等进行分析,探讨他们对涂层刀片性能的影响;通过衍射峰强度、强度比、D值等定性分析各物相及其定性含量,确定是否存在择优取向。X射线衍射分析是一种非破坏性的测定方法,检测快速方便,有助于生产中优化涂层工艺,提高涂层的整体加工性能,对硬质合金涂层的质量控制、机理研究和新工艺的研发均有着不可忽视的作用。

The properties of cemented carbide tools with coating are determined by their inner structure, especially the coatings. X-ray diffraction can analyze the phase, thickness, grain size, residual stress and carbon content of coating. All kinds of composition in the coating, such as Al2O3, TiC, TiN, η phase, can be analyzed by observing the diffr cfion patterns all kinds of phases and their content can be determined by analyzing diffraction peak intensity, intensity ratio and D value. And preferred orientation also can be judged. X-ray diffraction is a nondestructive testing method and it is fast and convenient. It helps to optimize the techniques of coating and improve the properties of coating. These have important effect on quality control, mechanism research and developing new techniques of the coating.