摘要
MEMS(微电子机械系统)湿度传感器是利用标准的CMOS技术加上MEMS的后处理技术制造,以其体积小、响应快等优点受到越来越多的重视,介绍了本实验室研制的MEMS压阻式湿度传感器的测试原理、硬件电路的设计和传输函数模型的建立,以及软件设计和封装设计,最后给出了样机的测试结果。
MEMS （Micro Electro Mechanical systems） humidity sensor manufactured by standard CMOS technology and MEMS post processing technology is becoming more and more popular because of having such advantages as small size and fast response time. This paper describes the theory of MEMS piezoresistive humidity sensor developed by our lab, introduces the design of hardware , software, and packaging, establishment of the model of transmission function. Finally we present the test result of the packaged sensor.
出处
《电子工程师》
2008年第11期53-55,62,共4页
Electronic Engineer
基金
国家863基金资助项目(2006AA040104)
关键词
MEMS
压阻式湿度传感器
信号采集
传输函数
封装设计
MEMS
piezoresistive humidity sensor
signal acquisition
transmission function
package design
