摘要
测量镀膜厚度的方法有很多,在实验室现有的条件下,探究光学干涉方法测出镀膜厚度,其中光学干涉方法包括两种:一是根据多光束干涉的原理,利用读数显微镜测量镀膜的厚度;二是根据白光干涉的原理,利用迈克尔逊干涉仪测量镀膜的厚度。
There are many methods of measuring the thickness of film, under the laboratory existing condition, we research the optical interference method,in which include two kinds：according the principle of multiple beam interference, using interference microscope to measure the thickness of films and using Michelson interferometer to measure the thickness of films.
出处
《大学物理实验》
2008年第4期17-19,13,共4页
Physical Experiment of College
关键词
真空蒸发镀膜
薄膜厚度
迈克尔逊干涉仪
vacuum evaporating coating films
thickness of film
Michelson interferometer
