摘要
综述了采用软化学方法制备VO2薄膜的工艺技术特点,以前驱物的划分为主线,着重探讨了前驱物的选择、氧分压和热处理温度等工艺条件对其物相结构与性能的影响,对反应热力学进行了初步的探讨.我们认为,热处理温度和气氛的调节控制是获得单一相热色VO2薄膜的技术关键.
The soft-chemical fabrication technologies of thermoehromic VO2 thin films have been introduced. The influences of precursor, oxygen pressure and heating temperature on the microstructure and properties of the thin films have been discussed. The thermodynamic of the pyrolysis reaction of V2O5 and VO2 have been investigated. It has been concluded that the controlling of the heating temperature and oxygen pressure is the key for obtaining single phase thermochromic VO2 thin films.
出处
《材料研究与应用》
CAS
2008年第4期465-469,共5页
Materials Research and Application
基金
中国科学院可再生能源与天然气水合物重点实验室创新基金(07A5406002)
国家"863"高科技计划(2007AA03Z326)
关键词
VO2薄膜
软化学法
制备
热处理温度
氧分压
VO2 thin film
sol-gel
preparation
heating temperature
oxygen pressure
