基于MEMS闪耀光栅的波分复用器的研究

Wavelength Division Multiplexer Based on MEMS Blazed Gratings

针对刻划光栅因周期误差和刻线的不平整所带来的鬼线和杂散光的不足和缺陷,提出了基于MEMS闪耀光栅的波分复用器的构成方法,介绍了基于MEMS闪耀光栅的波分复用器的基本组成,介绍了MEMS闪耀光栅的工艺实现以及提高其衍射效率的方案。在LabVIEW中对MEMS闪耀光栅进行了数值仿真分析,同时在ZEMAX中对波分复用器进行了光线追迹,其结果证明了MEMS闪耀光栅应用于波分复用器中的可行性。

Referring to the shortage and limitation of ruled grating which has ghost line and stray light because of period error and ruling irregularity, a method for making a Wavelength Division Multiplexer （WDM） is proposed based on Micro Electro-mechanical System （MEMS） blazed grating. The basic composition of WDM based on MEMS blazed grating is introduced according to the method. The craft for realizing MEMS blazed grating and the means for improving diffraction efficiency are also introduced. MEMS blazed grating is numerically simulated and analyzed in Laboratory Virtual Instrument Engineering Workbench （LabVIEW）. And the diffraction intensity distribution of blazed grating is presented. At the same time, the rays in WDM are traced in ZEMAX. The results prove that MEMS blazed grating can be applied well in WDM.