Sr_(0.75)Ba_(0.25)Nb_2O_6薄膜的PLD制备及其光学性能研究

Prepared by PLD and Optical Properties of Sr_(0.75)Ba_(0.25)Nb_2O_6 Thin Films

本文采用脉冲激光沉积(PLD)方法在熔石英衬底上制备了Sr0.75Ba0.25Nb2O6(SBN0.75)光波导薄膜,采用Hitachi U-3410紫外-可见分光光度计对SBN0.75薄膜的透射谱进行测量,编程计算得到了薄膜折射率色散关系,同时得到SBN0.75薄膜的厚度和光学带隙分别为647.0nm和3.97eV。采用Metricon 2010棱镜耦合仪测量得到SBN0.75光波导薄膜中能激发的TE模式有4个,TM模式有3个。波长在632.8nm处薄膜的折射率为2.2818。并利用透射谱计算得出的薄膜的折射率和厚度值,根据波导理论导光模本征值的有效折射率表达式,对SBN0.75薄膜中能激发的导光模个数及其对应有效折射率进行图解,其结果与棱镜耦合仪所测得的结果非常吻合。

Sr0.75Ba0.25Nb2O6（ SBN0. 75） thin films were prepared on quartz substrates by pulse laser deposition. The phases and structure of the SBN0. 75 thin films were studied by means of X - ray diffraction. The optical transmission of the films was measured by Hitachi U - 3410 spectrophotometer, and the dispersion of refractive index of the SBN0. 75 thin films were calculated by Mnifacier method. The thickness and band gap of the SBN0. 75 thin films were 647.05 nm and 3.97 eV, respectively. Its refractive index was 2. 2818 at 632.8 nm. The TE and TM molds of the SBN0.75 thin films were measured by Metricon 2010 prism coupler and the results showed that there are four TE molds and three TM molds in the SBN0. 75 thin films, which was in well agree with the result of graphic solution by using planar waveguide theory.