摘要
简述了用于成像器件紫外增强方面的薄膜技术研究进展。讨论了成像器件对紫外响应弱的原因,介绍了紫外增强的方案。重点介绍了有机和无机两类变频膜的材料、制备方法和性能。
The research progress in thin-film technology applied in UV-enhanced image sensors was summarized in this paper.The reason why typical image sensors had poor responsivity in the ultraviolet（UV） region of the spectrum was given.Some methods to improve the UV responsivity were introduced here,including the preparation ways and the performance of films.
出处
《激光杂志》
CAS
CSCD
北大核心
2008年第5期9-10,共2页
Laser Journal
基金
国家科技部支撑计划(2006BAK03A03)资助
上海市科委课题(06DZ22016)资助
上海市教委项目(06EZ011)
关键词
成像
薄膜
紫外
image
thin-film
ultraviolet
