太阳能硅片双束激光划槽方法与装置

The method and device of dual-beam laser lane designated slot for Solar silicon chip

本文提出一种太阳能硅片双束激光划槽方法和装置,它利用Z型谐振腔的Nd:YAG激光器,声光Q开关调制,经直角棱镜发射双束激光,扩束聚焦输出到太阳能硅片表面,划槽最小线宽:20μm,最大划片速度:120mm/s、使生产率提高100%,节约能源30%。

This paper presents a method and device of dual - beam laser lane designated slot for silicon solar which output to the surface of the polyerystal silicon chip using the Nd： YAG lasers of Z - resouator, modulation for acousto- optically Q- switch, though launching dual - beam laser from the right - angle prism , expanding solar energy line and forusing the beam. The minimum line width of slot is 20μm, the largest dicing speed is 120mm/s. This method and device of dual - beam laser lane designated slot for silicon solar the productivit？ increased 100 percent and the energy conservated 30 percent.