期刊文献+

基于等概率假设的TFT-LCD设备布局优化设计 被引量:2

Optimization Design of TFT-LCD Process Equipment Layout Based on the Assumption of Equivalent Probability
下载PDF
导出
摘要 通过对TFT-LCD主要加工工艺和主要设备工厂布局的分析,提出了一种设备布局的优化分析算法。这种算法假设前后工序的设备间的到达关系为等概率分布,进而求得工序间的平均物流距离。工厂总的物流距离是各工序间平均物流距离的和。利用这种分析算法分析了农场型设备布局方案和中心走廊型设备布局方案,结论是:中心走廊型设备布局方案有更短的物流距离。 A optimization algorithm of TFT-LCD process equipment layout was advanced through the analysis of the process flows and the typical layout of TFT-LCD factories. This algorithm was based on the assumption of equivalent probability of arrivals between the equipment of contiguous processes, and the average distance of any contiguous processes was thereby obtained. The overall distance of TFT-LCD process was obtained by the sum of all average distances. With the proposed algorithm a comparison was made between the layout of a farm and that of a center aisle, reaching the conclusion that the latter has better performance.
出处 《工业工程》 2008年第6期64-67,共4页 Industrial Engineering Journal
基金 信息产业部电子发展基金资助项目
关键词 薄膜晶体管液晶显示器 设备布局 工业工程 优化设计 TFT-LCD equipment layout industry engineering optimization design
  • 相关文献

参考文献10

  • 1Toba H, Izumi H, Hatada H. Dynamic load balancing among multiple fabrication lines through estimation of minimum inter-operation time [ J ]. IEEE Transactions on Semiconductor, 2005, 18( 1 ) : 202-213.
  • 2Cameron J. The coming of fab-wide automation[ J]. European Semiconductor, 1998, 20 (5) : 21-22.
  • 3Ting J H, Tanchoco J M A. Optimal bi-directional spine layout for overhead material handling systems[ J]. IEEE Trans. Semieonduct Manufaet, 2001,14(2) : 57-64.
  • 4Colvin, Theron, Gerald Mackulak. Fab design and development methodology much change to allow for successful integration 9f all systems [ J ]. Semiconductor Fabtech, 1999,2 (10) : 155-166
  • 5Gerald T. Mackulak, Paul Savory. A Simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility [ J ]. IEEE Transactions on Semiconductor Manufacturing, 2001, 14 (3) : 273-280.
  • 6Wu Bo-li. Factory throughput improvements through intelligent integrated delivery in semiconductor fabrication facilities [J ]. IEEE Transactions on Semiconductor Manufacturing, 2005, 18(2) : 222-231.
  • 7Jang Young Jae. TFT-LCD Automated guided vehicle systems analysis using axiomatic design [ DB/OL]. [ 2008-04- 18]. http: //www. ieeexplore. ieee. org/xpl/freeabs-all. jsp? isnumber = 4492987 & arnumber = 4493068 & count = 161 & index = 80.
  • 8L in J T, Wang F K. Lot release times and dispatching rule for a TFT-LCD cell process [ J ]. Robotics and Computer-Integrated Manufacaturing, 2008, 24(2): 228-238.
  • 9郑圣德.第五代TFT-LCD制屏工艺的最新进展[J].电子工艺技术,2005,26(1):52-54. 被引量:5
  • 10Geng Hwaiyu.半导体集成电路手册[M].赵树武,陈松,赵水林,等译.北京:电子工业出版社,2006.

共引文献4

同被引文献15

  • 1王俊峰.M台设备单行布置问题的一种新解法[J].安徽工学院学报,1995,14(3):82-87. 被引量:2
  • 2李永锋.基于虚拟现实的车间布局系统的研究[J].机械制造与自动化,2007,36(3):1-2. 被引量:2
  • 3Bartholdi J J,Platzman LK.Decentralized control of automated guided vehicles on a simple loop[J].lie Transactions,1989,21(1):76-81.
  • 4Pai P F,Lee C E,Su T H.A daily production model for wafer fabrication[J].International Journal of Advanced Manufacturing Technalogy,2004,23 (1):58-63.
  • 5Pyung-Hoi Koo,Jaejin Jang,Jungdae Suh.Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first[J].International Journal of Flexible Manufacturing Systems,2005,17 (1):23-38.
  • 6Hsieh Kun-Lin,Lu Yen-Sheng.Model construction and parameter effect for TFT-LCD process based on yield analysis by using ANNs and stepwise regression[J].Exerpt Systems with Applications,2008,34(1):717-724.
  • 7Liu Huiran,Jiang Zhibin,Fung Richard YK.Performance modeling,real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets[J].Computers & Industrial Engineering,2009,56(1):121-137.
  • 8Chung-Hsien Kuo,Chien-Sheng Huang.Dispatching of overhead hoist vehicles in a lab intrabay using a muhimission-oriented controller[J].International Journal of Advanced Manufacturing Technology,2006,27(7-8):824-832.
  • 9Geng Hwaiyll.半导体集成电路手册[M].赵树武,陈松.赵水林,等,译.北京:电子工业出版杜,2006.
  • 10田乃硕.随机服务系统[M].北京:北京大学出版社,2001.

引证文献2

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部