摘要
选用石英作为敏感元,研究一种压电式四维力传感器,根据不同切型石英的特点按特定方式排列组合,构成一个"晶组"式的传感器,实现无耦合测量空间多方向的力和力矩。通过有限元分析,对所提出的压电式四维力传感器进行仿真,得到影响该传感器原型开发的输出电压与输入力之间关系曲线、电压灵敏度、维间干扰等重要性能指标,并证明了该传感器能够有效地实现空间四维力的测量,为研制新型传感器原型奠定了重要基础。
For the research of a four-axis piezoelectric force sensor, quartz is chosen as the sensing element. Based on the characteristic of the quartz with different cutting-type, a ＇wafer group sensor is constituted according to a specific layout and the sensor can measure forces and moments on multi direction with no coupling. By using FEA （finite element analysis）, a presented four-axis piezoelectric force sensor is simulated. The input-output curve, voltage sensitivity and the coupling interference are obtained. These performance indexes have a significant influence on the development of the sensor prototype. The result demonstrates the sensor effectively implements the measurement of the forces on four directions and establishes a foundation for developing the new sensor prototype.
出处
《国外电子测量技术》
2008年第12期18-21,35,共5页
Foreign Electronic Measurement Technology
关键词
有限元分析
压电式四维力传感器
灵敏度
维间干扰
finite element analysis
four-axis piezoelectric force sensor
sensitivity
coupling interference
