恒流量装置在气体压力控制器中的应用

Constant Differential Flow Controller's Application to Gas Pressure Controller

介绍了恒流量装置的结构、设计原理、工作原理以及在气体压力控制器上的应用,并通过实验,验证了它的恒流量特性,为气体压力控制器的设计与研制提供了技术保证。

In this paper, the structure and principle of the constant differential flow controller, and how to apply the constant differential flow controller to gas pressure controller are introduced. The characteristic of the constant differential flow controller is validated by experimentation. The technique guarantee is provided for gas pressure controller by the constant differential flow controller.