自支撑Cu/Zr纳米多层膜的制备研究

Research in preparation of free-standing Cu/Zr nano-multilayer film

自支撑纳米多层膜可用作轻型反射镜面材料，自支撑薄膜的制备技术是目前应用中存在的主要问题之一。利用磁控溅射方法在抛光石英玻璃基片上复制了直径70mm厚约100μm自支撑Cu／Zr纳米多层膜，使用显微硬度计、表面轮廓仪分析了自支撑薄膜的力学性能和表面粗糙度。研究结果表明：自支撑Cu／Zr纳米多层膜面密度0．5kg／m^2，显微硬度5．7GPa，屈服强度1562MPa，复制面表面粗糙度1．33～1．93nm。复制的自支撑薄膜具有优异的力学及表面性能。

Self-supporting nano-muttilayer film can be applied in lightweight mirrors, the preparation of self-supporting film is a current research topic. Cu/Zr nano-multilayer film with 100μm thick and 70mm diameter have been prepared by magnetron sputtering in the silex substrate,Micro-sclerometer and surface profiler have been used to analyse the mechanical performance and surface roughness of the free-standing nano-multilayer film. Results show that the area density of Cu/Zr nano-multilayer film is about 0. 5kg/m^2, the microhardness is 5. 7GPa,the yield strength is 1562MPa,and the surface roughness is between 1.33-1.93nm. Cu/Zr free-standing nano-multilayer film have excellent mechanical performance and high surface quality.