金属基体上YSZ过渡层及YBCO薄膜结构与沉积条件的关系

Relation between Deposition Condition and Microstructure of YBCO Film and YSZ Buffer Layer on Metallic Substrate

研究了两种在金属基体（ＨａｓｔｅｌｏｙＣ）上沉积的、以钇稳定的ＺｒＯ２（ＹＳＺ）为过渡层的ＹＢａ２Ｃｕ３Ｏ７－ｙ薄膜结构，并讨论了结构与沉积条件的关系。当沉积速率低时，ＹＳＺ层致密、均匀，存在织构取向，且与基体连接良好；而高速率沉积的ＹＳＺ层疏松，与基体结合差。ＹＢＣＯ薄膜的结构和性能与沉积时的基体温度相关。

Microstructures of two YBa 2Cu 3O 7- y (YBCO) films deposited on metal lic substrate (Hastelloy C) with yttria stabilized zirconia (YSZ) buffer layer were studied comparatively. Relation between microstructure and deposition condition was also discussed. The YSZ buffer layer is dense, even, textured and well bonded to the substrate under the condition of low deposition rate. On the contrary, the YSZ layer depositing with a high rate is loose and bonded badly to the substrate. Property and surface grain size of YBCO film are related to the substrate temperature in the deposition process.