摘要
本文介绍了为解决测压仪表的高精度、完全电绝缘测量等问题而研制的一种三光束干涉压力计。阐述了其工作原理、系统组成及测试结果。
In order to solve the problem of high precision,complete electric insulating detection of the pressure measuring system,we have developed the three-beam interferometer.In this paper,the operating principle,consitution of the system and measuring reasults are given.
出处
《仪表技术与传感器》
EI
CSCD
北大核心
1998年第1期16-18,22,共4页
Instrument Technique and Sensor
关键词
三光束干涉仪
压力计
弹性膜片
Three Beams Interferometer,Pressure Guage,Flexure Diaphragm.
