E型硅杯结构偏差对膜片应力分布的影响

The Influence of the Structure Deviation of E-Type Silicon Wafer on the Stress Distribution of Its Diaphragm

本文通过有限单元法对Ｅ型硅杯进行应力分析，研究Ｅ型硅杯的结构偏差对膜片应力分布的影响，进而给出Ｅ型硅杯的结构偏差与膜片应力非线性度的关系。

In this paper,the stress analysis of E-style silicaon wafer by the method of finite element is given.Also the influence of the structure deviation of E-style silicon wafer from to its stress distribution is discussed,and the relation between structure deviation and stress nomlinearity is presented.