摘要
阐述了微电子机械系统的定义、内容、特点、发展现状、应用前景及其对国民经济、科学技术、国防和人民生活所具有的重要意义;介绍了目前国际上在该领域的成就和未来的发展趋势。
Definition. contents, features, current status, prospect of application of micro-electro-mechanical system and its important significance for national economy, science and technology, national defense and people's life are stated. Its current achievements and future trends are also outlined.
出处
《机电一体化》
1998年第1期13-15,共3页
Mechatronics
关键词
微电子机械系统
机电一体化
表面微加工
microelectro-mechanical system
mechatronics technology
surface micro-machining
LIGA processing
