热蒸发制备的硫化锌薄膜的结构分析

Structural Analysis of ZnS Thin Film Prepared by Thermal Evaporation

用双舟热蒸发制备了掺稀土硫化锌薄膜，用ｘ射线衍射技术对硫化锌粉末和所制薄膜的晶体相结构进行研究，发现硫化锌薄膜的晶体结构与硫化锌粉末的晶体结构不同。薄膜晶体的生长受诸多因素影响，有择优取向生长趋势，是二维层状结构沿ｃ轴方向的密堆积。这些研究为高新材料的研制提供了参考。

ZnS thin films doped with erbium are prepared by thermal evaporation with two boats , and the crystalline phase structures of ZnS powder and the prepared films are studied using x-ray diffraction technique. lt is found that the structure of ZnS film is dif- ferent from that of ZnS powder. The growth of film crystal is affected by numbers of factors and tends to a preferential orientation. The film is two-dimensional layer struc- ture packing along c axis. lt provides basis for research on new luminescence material with high efficiency.