纳米位移传感器最小检测信号评述

Review of Minimum Detectable Signal ofNanometer Displacement Sensor

综合分析了各种纳米位移传感器的特性及灵敏度。通过传感方法和传感结构，运用统一的模型进行定量分析和比较。得出了各种传感器最小检测信号的计算公式及理论值。

Specialties and sensibilities of various nanometer displacement sensors are synthetically analyzed By the use of sensing means and sensor shells, those sensors are quantitatively compared with uniformed model Finally the formula and theoretical values of their MDS’s (Minimum detectable signal) are reached