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硅微机械音叉陀螺检测灵敏度与固有频率的关系 被引量:2

Relationship Between Sensitivity of Silicon MicromechanicalTuning-Fork Gyroscopy and Its Natural Frequencies
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摘要 检测灵敏度直接关系到陀螺性能的优劣。并尝试用静电力调节敏感模态谐振频率,以提高检测灵敏度。 Micromechanical gyro performance is dependent on its sensitivity. How to tune the sense mode resonance frequency to improve the sensitivity are discussed.
出处 《传感器技术》 CSCD 1998年第1期12-15,共4页 Journal of Transducer Technology
关键词 陀螺 微机械音叉陀螺 谐振频率 灵敏度 Micromechanical tuning-fork gyro Natural frequency Sensitivity
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参考文献1

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同被引文献10

  • 1陈懿,金仲和,王慧泉,焦纪伟,王跃林.微机械振动式陀螺接口电路设计与实现[J].仪器仪表学报,2005,26(7):726-732. 被引量:12
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