电极对PZT铁电薄膜性能的影响

Effect of Electrodes on Properties of PZT Ferroelectric Thin Films

用溶胶－凝胶法制备ＰＺＴ铁电薄膜。以Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ为底电极，Ａｕ为上电极，形成金属－铁电薄膜－金属结构的铁电电容器。研究电极对ＰＺＴ铁电薄膜结构和电性能的影响，实验发现，金属Ｔｉ的厚度会影响ＰＺＴ铁电薄膜的结构。界面层的存在使介电系数、自发极化、矫顽电压、漏电流都与薄膜的厚度有关。

PZT ferroelectric thin films were prepared by Sol Gel method. The ferroelectric capacitance with Pt/Ti/SiO 2/Si bottom electrodes and Au top electrodes have M F M structure.The effect of electrodes on the structure and electrical properties of PZT thin films was investigated. In the examples it was discovered that the thickness of metal Ti would affect the structure of PZT ferroelectric thin films. Dielectric constant polarization coercive voltage and leakage current have relations with the thickness of thin films because of the interface layer.