微透镜和高Tc超导红外探测器组件

High Tc YBa 2Cu 3O 7- δ Superconducting Infrared Detectors Coupled with A Linear Cylindrical Microlens Arrays in Quartz Glass

本文首次报道了利用微透镜阵列来提高ＹＢＣＯ高Ｔｃ超导薄膜红外探测器的光响应特性，介绍了利用光刻／离子束刻蚀的方法制作单片线列石英微透镜阵列的工艺以及制备线列ＹＢＣＯ高Ｔｃ超导薄膜红外探测器的方法，并将所制的石英微透镜阵列应用于ＹＢＣＯ超导器件。实验结果显示，所制超导红外探测器阵列的光响应特性有明显改善。

A linear cylindrical microlens arrays in quartz glass is fabricated by photolithography and Ar ion beam milling,the high Tc YBa 2Cu 3O 7- δ superconducting thin film is deposited by excimer laser scanning ablation,the superconducting IR detectors is patterned by photolithography and Ar ion beam etching,and the microlens arrays and the bolometers fabricated is coupled with a special infrared glue.The infrared response characteristics of the device are measured.