摘要
本文介绍了用准波导耦合ｍ线技术测量聚合物薄膜厚度的方法。测量结果表明，薄膜样品厚度的误差为３．６２×１０－２μｍ。并对测量精度作了分析和讨论。
The thickness of the polymer film was measured by using the quasiwaveguide m line method.The result shows that the rms error of the thickness of the film is 3.62×10 -2 μm.The measurement accuracy was analysed and discussed.
出处
《光电子．激光》
EI
CAS
CSCD
1998年第1期35-36,共2页
Journal of Optoelectronics·Laser
基金
国家自然科学基金
关键词
聚合物薄膜
准波导
厚度测量
薄膜
polymer thin film
quasi waveguide
thickness measurement
