SnO_2-Sb薄膜材料的制备及气敏性能

Preparation of SnO 2 Sb thin film and its gas sensitivity

利用等离子体化学气相沉积法制备了ＳｎＯ２－Ｓｂ导电薄膜，测试了ＳｎＯ２－Ｓｂ的气敏效应。结果表明，该薄膜对ＮＯ２气体有较好的气敏特性。当测试温度升高，其气敏响应时间相差无几，但恢复时间变短，同时气敏灵敏度相对提高，当温度达到２００℃以上时，灵敏度基本恒定。同时还可看出，不同阻值的薄膜其气敏灵敏度相差不大。

SnO 2 Sb thin film is prepared with PCVD The film possesses better gas sensitivity When temperature rises, the response time maintains almost the same but the recovery time reduces and the sensibility gets higher When the temperature reaches 200℃ or more, the sensitivity maintains stable The difference between the sensibility of the resistors of different resistance is small (4 refs )