压电陶瓷等离子喷涂技术与应用基础研究

Formation and Application of Plasma Sprayed Piezoelectric Material Coating

介绍压电陶瓷材料等离子喷涂工艺方法的概念及用此法制作压电陶瓷元件的方法。用这种技术制作的压电元件具有体积小、无需粘贴等特点，尤其适合于大面积压电传感元件和压电作动元件阵列的制作。压电陶瓷涂层制作常见缺陷如孔隙率高、成分易挥发、结合强度较低等可通过优化工艺参数来解决。

The basic principle of the plasma spraying technology for piezoelectric material is that the precursor ceramic powder injected into plasma jet is heated,accelerated and projected on to the subtrate. The droplets are deformed and solidified at the surface of substrate and the coating is formed. It is easy to develop piezoelec tric sensors and actuators from plasma piezoelec tric coating by polarization in certain conditions.The piezoelectric elements based on this technol ogy have the characteristics of high productivity,small size with thin coating and can be utilized without bondage. Some problems such as high porosity, contamination and volatilization, poor cohesion may be overcome by optimizing the processing parameters.