基于荷花效应的双微观超疏水表面制作技术研究

Fabrication Method of Binary Micro-structure Super-hydrophobic Surface Based on Lotus Effect

提出了基于荷花效应的双微观结构的制作及其复制技术,介绍了采用阳极氧化技术制作双微观结构氧化铝模板的方法。应用该模板采用纳米压印技术可制作塑料微流通道,采用纳米压印、反应离子刻蚀结合硅烷化和烷基烯酮二聚体(alkyl ketene dimmer,AKD)处理法可制作硅基仿生功能结构。表面接触角测试表明,采用该技术制作的塑料及硅结构具有超疏水性。该工艺可用于微流器件、微传感器、微执行器等塑料或硅基微机电系统(MEMS)器件功能表面的改形制造,在实现微观器件表面减摩防粘功能上具有广泛的应用前景。

This paper presented fabrication and replication technology of binary micro-structure based on lotus effect. Aluminum template had been produced by means of anodic oxidation. Plastic micro-channels were pressed with above template by nanoimprinting lithography, furthermore, silicon based bionic functional structures were attained by NIL, reactive ion etching combined silane and alkyl ketene dimmer treatment. According to surface contact angle test results, plastic and Si structure all reveal super-hydrophobic. Therefore, the presented researche results demonstrate the technology is applicable for functional surface shape modification of MEMS including micro-fluidic devices,micro-sensors and micro-actuators, and it has potential applications on reducing friction and preventing stiction.