期刊文献+

铜丝引线键合技术的发展 被引量:14

Development of copper wire bonding technology
下载PDF
导出
摘要 铜丝引线键合有望取代金丝引线键合,在集成电路封装中获得大规模应用。论文从键合工艺、接头强度评估、键合机理以及最新的研究手段等方面简述了近年来铜丝引线键合技术的发展情况,讨论了现有研究的成果和不足,指出了未来铜丝引线键合技术的研究发展方向,对铜丝在集成电路封装中的大规模应用以及半导体集成电路工业在国内高水平和快速发展具有重要的意义。 Copper wire bonding is considered to be able to replacing gold wire bonding in the field of interconnection of ICs(integrate circuits). This paper presents the recent development including bonding process design,bond strength evaluations,bonding mechanism and modern research method of copper wire bonding. The results and shortage of the present research work are discussed. The trend of copper wire bonding research is also pointed out,which will be helpful for the widely using of copper wire in IC assembly processes and quickly and nicely developing of IC industry in China.
出处 《焊接》 北大核心 2008年第12期15-20,共6页 Welding & Joining
基金 国家自然科学基金(50628506 50705049)资助。
关键词 集成电路封装 铜丝引线键合 工艺 integvate circuit assembly, copper wire bonding, process design
  • 相关文献

参考文献23

  • 1Harman G. Wire bonding in microelectronics : materials, processess, reliability, and yield [ M ]. Second edition, McGraw Hill, New York, USA, 1997.
  • 2Hang Chunjin,Wang Chunqing, Shi Mingda. Study of copper free air ball in thermosonic copper ball bonding[ C ]. 6th International Conference on Electronic Packaging Technology. Shenzhen, Guangdong, China, 2005.
  • 3Michael Sheaffer, Lee R Levine, Brian Schlain. Optimizing the wire -bonding process for copper ball bonding, using classic experimental designs [ J ]. IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1987, 10(3) :321 -326.
  • 4Inderjit Singh,Jiayu On,Lee Levine. Enhancing fine pitch, high I/O devices with copper ball bonding[ C]. IEEE Electronic Components and Technology Conference, Lake Buena Vista, FL, USA, 2005.
  • 5Hong Shouyu, Hang Chunjing,Wang Chunqing. Experiment research of copper wire ball bonding [ C ]. 6th International Conference on Electronic Packaging Technology. Shenzhen, Guangdong, China,2005.
  • 6Kenji Toyozawa, Kazuya FujiTa, Syozo Minamide, et al. Development of copper wire bonding application technology [ J ]. IEEE Transactions On Components, Hybrids, and Manufacturing Technology, 1990,13 (4) : 667 - 672.
  • 7Shingo Kaimori ,Tsuyoshi Nonaka,Akira Mizoguehi. The development of Cu bonding wire with oxidation - resistant metal coating [ J]. IEEE Transactions on Advanced Packaging, 2006,29 (2) :227 - 231.
  • 8Khoury S L, Burkhard D J, Galloway D P, et al. A comparison of copper and gold wire bonding on integrated circuit devices [ J ]. IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1990,13 (4) : 673 - 681.
  • 9Chang Hen-So,Hsieh Ker-Chang,Theo Martens,et al. Wire -bond void formation during high temperature aging [ J ]. IEEE Transactions on Components and Packaging Technologies ,2004,27( 1 ) :155 - 160.
  • 10Jonathan Tan, Boon Hoe Toh, Hong Meng Ha. Modelling of free air ball for copper wire bonding [ C ]. 6th Electronics Packaging Technology Conference, Singapore,2004.

同被引文献178

引证文献14

二级引证文献108

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部