摘要
研究了真空热处理对非晶C3N4薄膜的晶化作用,X射线衍射(XRD)谱和透射电镜选区电子衍射(TED)图象表明。
The action of thermal post-treatment in vacuum on the crystallizing of amorphous carbon nitride thin film has been studied As Xray diffraction(XRD) spectrums and the transmission electron deffraction (TED) patterns indicated that the thermal posttreatment in vacuum does great benefit to the synthesis of βC3N4 crystal structure
出处
《材料工程》
EI
CAS
CSCD
北大核心
1998年第3期9-10,16,共3页
Journal of Materials Engineering
关键词
氮化碳薄膜
真空热处理
晶体
热生长
超硬材料
carbon nitride thin films thermal posttreatment in vacuum crystal structure