KBA显微成像系统程序设计与模拟

Programming Design and Simulation of KBA Microscope Imaging System

近20年来,由于X射线光刻技术、空间技术以及激光引爆的惯性约束聚变(ICF)的过程诊断等的需求,X射线成像技术获得迅速发展。但是,由于常规的成像方法难以适应X射线波段,目前大多采用掠入射反射成像和编码孔径成像方法。KBA显微镜为掠入射非共轴X射线反射成像系统,而且四块反射镜是空间分布的,前两块反射镜和后两块反射镜之间并不是严格互相垂直的,这给像质分析带来相当大的困难。通常的光学CAD软件难于适应这种光学系统。因此设计了掠入射非共轴反射成像的KBA显微镜成像系统程序,并用该程序分析了该系统的综合误差。物距公差为-0.4^+1 mm,掠入射角公差在-8″~0,双反射镜公差在-20″~0,弥散斑的变化在允许的范围内。

In the latest 20 years, X-ray imaging technology has developed fast in order to meet the need of X-ray photo-etching, space exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion （ICF） etc. However, conventional imaging methods are hardly suitable to X ray range, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. KBA X-ray microscope is grazing non- coaxial incident X-ray microscope, and four mirrors distribute spatially. The front pair is not perpendicular to the back pair strictly, but tilts a small angle along the ray, and it brings very large difficulty to analysis of image quality. Thus general optical CAD program is not suitable to this kind of optical system. In this paper, programming for non coaxial grazing incident microscope is discussed in detail, and it is used to analyze the synthesis errors. When the tolerance of object distance is between --0.4~ ＋ 1 mm, the tolerance of grazing incident angle is between --8″-0, and the tolerance of angle between the bimirror is within --20″-0, the blur is permitted.