我国电子信息重大装备技术进步思考

Think on Key Equipment Technology of Electronic Information in China

在振兴我国装备制造业大背景下,从大规模集成电路、平板显示器关键工艺装备等方面出发,对我国电子信息重大工艺装备研究技术现状、发展需求和制约行业技术发展的原因进行了概括分析,对我国在这一领域实现技术跨越、赶超世界先进水平所面临的困难进行了思考。

Analyse the present situation, development demand of key equipment technolgoy of electronic information and the reason of restricting industry technology devetopment from LSIC, FPD and so on in China. Give out the challenge and think of bringing about technology leap and catching up with and surpassing the world＇s advanced levels.