微透镜阵列用于线列红外探测器的研究

IR DETECTOR ARRAY WITH QUARTZ MICROLENS

采用离子束刻蚀制备了线列长方形拱面熔凝石英微透镜阵列，用准分子激光扫描消融法淀积了性能均匀而且稳定的ＹＢａ２Ｃｕ３Ｏ７－δ高温超导薄膜，用湿法刻蚀制备了超导薄膜器件，用微透镜阵列与超导薄膜器件耦合构成组合式红外探测器．测试了组合器件在１～５μｍ红外波段的光响应特性．

A rectangular arch quartz microlens array was fabricated using ion beam milling. The high Tc YBa 2Cu 3O 7- δ superconducting thin films with uniform and stable performances were deposited by using excimer laser scanning ablation. The superconducting thin film device was patterned by photolithography method, and for the first time the microlens / IR detectors were prepared by using a special glue to connect the quartz microlens array and the superconducting IR detector. The optical response characteristics of the device were measured in the region of 1￣5μm IR optical spectrum.