铝合金表面(Ti_xAl_y)N薄膜构成及耐磨、耐蚀性探讨

Antiwear and Anticorrosion Behaviors of Magnetron Sputtered (Ti_xAl_y) N Film on 6063 Aluminum AUoy

传统的阳极氧化技术可以提高铝合金的表面防护装饰性能。为了进一步扩大其应用范围,提高其使用寿命,通过磁控溅射技术,在6063铝合金的表面镀覆了一层(TixAly)N薄膜,利用薄膜测厚仪、显微硬度计、X射线衍射仪以及扫描电镜分别测量和分析了薄膜的厚度、硬度、相组成及表面形态。研究发现,6063铝合金表面镀覆(TixAly)N薄膜,可以明显提高6063铝合金的硬度。主要原因是(TixAly)N薄膜中几个强化相(TiN、AlN、Ti3AlN)硬度较高;与传统的阳极氧化膜相比,(TixAly)N薄膜与基体6063铝合金的结合性能更好,因而具有较高的致密性,有益于6063铝合金抗腐蚀和抗磨损性能提高。6063铝合金镀覆(TixAly)N薄膜后在装饰行业将有广泛的应用前景。

(TixAly)N film was prepared on the surface of 6063 Al alloy by magnetron sputtering,aiming at broadening its application scope and in-creasing its service life.The thickness and hardness of the film were measured using a thickness meter and microhardness tester,respectively,while its phase composition and morphology were analyzed by means of X-ray diffraction and scanning electron mi-croscopy.It was found that the(Tix Aly)N film contributed to greatly increase the hardness of 6063 Al alloy substrate,which was attributed to the strengthening effect of hard phases such as TiN,A1N,and Ti3AlN.At the same time,(TixAly)N film pre-pared by magnetron sputtering was superior to conventional anodic oxidation coatings on Al alloy in terms of the compactness,adhe-sion to substrate,and effectiveness in increasing the antiwear and anticorrosion behaviors of the Al alloy substrate.This could make it feasible for the magnetron sputtered(Tix Aly)N film to find promising applications in decoration industry.