摘要
采用石英做介质阻挡层,对高气压XeI*准分子紫外光源进行了实验研究,从放电功率、放电频率、总气压、气体配比等参数分析了光源的工作特性,其最佳工作参数为总气压320Torr、I2分压0.37%,电源频率58.7kHz。在此条件下当放电电压4.6kV、功率66W时,在距光源8.5cm处得到的紫外光辐射强度为31.2μW/cm2。
An experimental study on XeI^＊ excimer UV lamp stimulated by dielectric barrier discharge （DBD） was investigated. By using quartz as dielectric barrier layer, the working parameters of this lamp were analyzed from the applied power, discharge frequency, total pressure and the ratio of mixture gases. The optimum condition came with total pressure 320Torr, 0. 37% iodine ratio and 58. 7kHz＇ s frequency. Under the applied voltage 4. 6kV, power66W, an UV radiation intensity of 31.2μW/cm^2 was obtained at the distance of 8. 5cm from the quartz tube.
出处
《信息记录材料》
2009年第1期8-11,37,共5页
Information Recording Materials
基金
北京市教委科技面上项目(KM200710015002)支持
