摘要
通过设计合适的温场,解决了重掺单晶生长过程中的组分过冷和位错密度高的问题,获得了高掺杂浓度高迁移率的无位错单晶。
Proper temperature profile was designed to solve the problems of heavilydoped Germanium single crystal growth. High temperature gradient in the melt near the solid-liquid interface was required to prevent constitution supercooling, and lower temperature gradient in the crystal was obtained at the same time to decrease dislocations. High Hall mobility and freedislocation single crystal were obtained.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
1998年第2期120-122,共3页
Chinese Journal of Rare Metals
关键词
温场
锗
单晶
重掺
隧道二极管
Temperature profile, Heavilydoped, Germanium, Single crystal growth