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隧道二极管用锗单晶制备的温场设计

Temperature Profile Design for Ga Heavily-doped Ge Single Crystal Growth
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摘要 通过设计合适的温场,解决了重掺单晶生长过程中的组分过冷和位错密度高的问题,获得了高掺杂浓度高迁移率的无位错单晶。 Proper temperature profile was designed to solve the problems of heavilydoped Germanium single crystal growth. High temperature gradient in the melt near the solid-liquid interface was required to prevent constitution supercooling, and lower temperature gradient in the crystal was obtained at the same time to decrease dislocations. High Hall mobility and freedislocation single crystal were obtained.
出处 《稀有金属》 EI CAS CSCD 北大核心 1998年第2期120-122,共3页 Chinese Journal of Rare Metals
关键词 温场 单晶 重掺 隧道二极管 Temperature profile, Heavilydoped, Germanium, Single crystal growth
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