摘要
微粒子存在于基体表面,会对基体各方面性能造成影响,现在很多学者致力于微粒子方面的研究。为了了解在微粒子粘附、清除和预防方面的科研进展情况,利用美国工程索引Ei数据库,以Particle,Adhesion和Removal3个主题词检索了2003年至今的研究成果,共检索出相关的文献100余篇。对这些文献做了详细的分析,并根据它们的发表时间、研究内容、作者国家、测试设备、应用领域和前沿方向分别做了统计,提出了该领域今后的发展方向。
The micro-particles adhered on materials will influence behaviors of the materials, as shown by studies in the area. This paper reviews studies on adhesion and removal of micro-particles, based on the database "Ei Compendex" with three subject words: particle, adhesion and removal, from which about 100 papers are found. The statistics of the time of publication, research topics, authors" countries, test equipments and application fields are analyzed. In conclusion, the development directions on the field are pointed out.
出处
《科技导报》
CAS
CSCD
2008年第24期95-98,共4页
Science & Technology Review
基金
国家自然科学基金项目(50474050)
教育部博士点专项基金项目(20040533011)
关键词
微粒子
粘附
清除
清洁技术
micro-particle
adhesion
removal
cleanliness technique