超精密级弹性变形微量进给装置及其单板机闭环控制系统

The ultra—precision Compliance Microdisplace ment Actuator and its Closed—loop Control System Based on a Single Board Microcomputer

本文介绍一种新型超精密机械加工微量进给装置及其单板机闭环控制系统。该装置采用 T 型弹性变形位移变换器,克服了传统微量进给机构的缺点,具有0.01μm 的高分辨率、±0.01μm 重复定位精度和稳定的动态特性,操作方便。

In this paper a new kind of mechani- cal type microdisplacement actuator used in ultra— precison machining is described,and its closed— loop control system based on a single board micro- computer described also.The actuator has a high res- olution of 0.01μm and a repeat positioning accura- cy of±0.01μm,and its practical applications show that it has stable dynamic character and convenient usability.Especially,the usage of a Type compli- ance displacement transformer in the actuator avoids the essential defects of traditional actuators.