IMU中MEMS惯性器件的温度补偿方法

Temperature compensation method of MEMS inertia devices in IMU

MEMS器件目前使用已经比较普及,陀螺器件的温度补偿技术的应用也已经相当广泛,但在补偿过程中,由于MEMS器件本身重复性和精确性都比较差的特点,测量数据波动比较大,高低温实验温度曲线往往不能重合,而且测量过程中经常出现异常点,这给进行曲线拟合与标定带来了一定的问题.文章阐述了对一种采用MEMS陀螺作为其惯性器件的小型化IMU进行高低温补偿的实验方法,在实际高低温实验标定过程中,对实验出现的高低温度曲线不重合以及数据波动比较大的情况,进行比较有效的曲线拟合,使对MEMS陀螺器件的温度补偿达到比较理想的效果.

With the popularization and application of MEMS devices in these years, the temperature compensation technique of MEMS gyroscopes is also widely applied. But during the compensation procedures, the temperature curves of the high and low temperature testing can not coincident because of the bad repeatability and accuracy of MEMS device itself and the fluctuation of the testing data. Bedsides, unusual points also frequently appear during the testing. These factors all ca, use problems in curve fitting and calibration. This article demonstrates a method of temperature compensation of the mini-size IMU with MEMS gyros. During the actual temperature calibration process, this method conducts effective curve fitting under the situation of the un-coincident of temperature curves and the fluctuation of testing data, and achieves good result in the temperature compensation of MEMS gyroscopes.