多晶硅副产物四氯化硅的综合利用技术

The Comprehensive Utilization Technique of Silicon Tetrachloride,the Byproduct of Polysilicon

四氯化硅的用途有四个方面:一是氢化还原为三氯氢硅;二是合成气相二氧化硅;三是合成硅酸乙醇;四是提纯为光纤级四氯化硅。

With the rapid development of the polysilicon industry in China,problems existing in safety and environmental protection of silicon tetrachloride produced during the polysilicon production are increasing obviously.How to deal with silicon tetrarchloride safely has become the key problem that related to the healthy development of polysilicon industry.This article gives an outline of industrial application processes of silicon tetrachloride including hydrogenation reduction,fumed silica synthesis, tetraethylorthosilicate(TEOS)preparation and purification process of silicon tetrachloride for optical fiber etc.Some suggestions on the measures of dealing with silicon tetrachloride,the byproduct of polysilicon are proposed as well.