一种新型微波等离子体增强辉光放电光源基本特性的研究

STUDIES ON THE GENERAL PROPERTIES OF A NOVEL MICROWAVE PLASMA ENHANCED GLOW DISCHARGE SOURCE

本文介绍了一种改进型的微波等离子体增强辉光放电光源。对它的结构，操作以及工作参数（工作气压Ｐ、电流强度Ｉ，电压Ｖ、微波功率Ｗ）和溅射等进行了详细的讨论。

This paper introduced a novel microwave plasma enhanced glow descharge source,the structure design and operation were decribed,and the mutual effects of the main characters,such as pressure,current,voltage,microwave power and sputtering rates were also investigated in details.