摘要
新的离子型光敏聚酰亚胺侯豪情李悦生丁孟贤＊（中国科学院长春应用化学研究所，中国科学院－中国石化总公司高分子化学联合开放实验室长春１３００２２）关键词光敏聚酰亚胺，制备，光刻胶１９９７－０７－１７收稿，１９９７－１２－１８修回吉林省重点科技发展项目离子...
A novel iontype photosensitive polyimide(PSPI) with thiophen acrylic acid as photosensitizer was prepared. It has a sensitivity of 2500 J/m2 and resolution of 1￣2 μm under irradiation with Hg lamp of 365 nm wavelength. The catalytic influence of tertiary amine on the imidization of poly(amic acid) during PSPI preparation has been discussed as well.
出处
《应用化学》
CAS
CSCD
北大核心
1998年第2期100-102,共3页
Chinese Journal of Applied Chemistry
基金
吉林省重点科技发展项目
