测量微球覆层厚度的X射线衍射法

X-ray diffraction method of measuring microball coat thickness

对采用X射线衍射测量微球覆层厚度的方法进行研究,首先在建立微球X射线衍射数学模型的基础上,利用1组已知厚度和X射线衍射线积分强度的标样,用计算机模拟求解的方法,得到微球衍射线积分强度和覆层厚度的关系。然后,在相同条件下进行待测试样的X射线衍射实验,将其衍射线积分强度代入求解模型得到的结果中就能得到待测试样的覆层厚度。实验结果表明,X射线衍射法是可行的,具有快速、方便、非破坏、不接触等特点。

Use of the X-ray diffraction method to measure microball coat thickness is studied. A mathematical model of X-ray diffraction of microballs is created and solved using computer aided simulation. The relationship between diffracted X ray intensity and coat thickness is calculated with the help of a standard sample possessing a known thickness. The coat thickness of other samples can be calculated by the intensity of diffracted X-ray based on the same condition. The experimental result shows that this method is a rapid, convenient, non-destructive means of measuring microball coat thickness.